SERVOPRO NanoChrome

SUB-PPB TRACE MEASUREMENT
OF H2, CH4, CO, CO2, N2, Ar
AND NMHC FOR THE
SEMICONDUCTOR INDUSTRY
Incorporating the latest advances in gas
sensing technology and signal processing
methodology, the NanoChrome revolutionizes
ultra-trace purity measurements for the
semiconductor industry.

SKU:SM0016

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FEATURES AND BENEFITS
– In compliance with Low Voltage, EMC and applicable Directives
– New Plasma Emission Detector (PED) Sensor technology enables sub-ppb measurements of H2, CH4, CO, CO2, N2, Ar and NMHC
– Enables unique total Servomex solution for UHP gas analysis

APPLICATIONS
– Semiconductor production – quality control measurements
– Semiconductor production – stationary analytical systems
– UHP gas production – quality control measurements