SERVOPRO DF-560E NanoTrace ULTRA

MEASURES ULTRA-TRACE O2 TO
THE LOWEST LEVELS
Designed to measure ultra-trace O2 to
the ultra-low ppt levels demanded by the
semiconductor sector, the DF-560E ULTRA
delivers an industry-leading 45ppt LDL.
Once the analyzer is measuring below 1
ppb, the units automatically convert to
ppt for better resolution of the smallest of
concentration movements.

SKU:SM0018
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MEASURES ULTRA-TRACE O2 TO
THE LOWEST LEVELS
Designed to measure ultra-trace O2 to
the ultra-low ppt levels demanded by the
semiconductor sector, the DF-560E ULTRA
delivers an industry-leading 45ppt LDL.
Once the analyzer is measuring below 1
ppb, the units automatically convert to
ppt for better resolution of the smallest of
concentration movements.

FEATURES AND BENEFITS
– Lowest level O2 detection available to the semiconductor industry
– Automated maintenance performs zero and span calibrations on a scheduled basis
– Fast response and quick upset recovery ensures highly stable operation

APPLICATIONS
– Continuous quality control monitoring
– Inert gases control checks for electronics grade gases
– Post-purifier quality certification
– Leak detection for electronics-grade gases

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