SERVOPRO DF-750 NanoTrace ULTRA
THE FIRST CHOICE IN
MOISTURE ANALYSIS FOR THE
SEMICONDUCTOR INDUSTRY
A TDL-based trace/ultra-trace analyzer,
the DF-750 ULTRA delivers industry-best
measurements of moisture as a contaminant
in the ultra-high-purity (UHP) gases used in
300mm semiconductor fabs, with a Lower
Detection Limit of 55 ppt.
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THE FIRST CHOICE IN
MOISTURE ANALYSIS FOR THE
SEMICONDUCTOR INDUSTRY
A TDL-based trace/ultra-trace analyzer,
the DF-750 ULTRA delivers industry-best
measurements of moisture as a contaminant
in the ultra-high-purity (UHP) gases used in
300mm semiconductor fabs, with a Lower
Detection Limit of 55 ppt.
FEATURES AND BENEFITS
– Exceptional 55ppt LDL delivers the sensitivity and precision demanded by semiconductor makers
– Water contact with optical components is minimized for optimum reliability
– Storage and recall function for archiving of operational history
APPLICATIONS
– Continuous quality control of bulk UHP gases for semiconductor fabs













